| VAR-00-664198-00 | 5006306060 | Cover, Anode, Al | View Image |
| VAR-00-664198-00 | 5006306090 | Cover, Anode, SS | View Image |
| VAR-00-664219-00 | 5006306031 | Shield, Cavity, 4"/5" | View Image |
| VAR-00-672057-00 | 5006306098 | Clip, Wafer | View Image |
| VAR-00-672057-00 | 5006306099 | Clip, Wafer, Modified | |
| VAR-00-672313-00 | 5006106011 | Piece, Pole, Outer | View Image |
| VAR-00-672313-00 | 5006106014 | Pole, Piece, Outer, Al | View Image |
| VAR-00-674505-00 | 5006306088 | Ring, Clip, Ceramic, 4" | View Image |
| VAR-00-674782-00 | 5006106004 | Ring, Clip, Ceramic, 5" | View Image |
| VAR-00-674830-00 | 5006306032 | Insert, Table, RF, Etch, 5" | View Image |
| VAR-00-678474-01 | 5006106016 | Shutter, SS (Perforated Assembly) | |
| VAR-00-678475-01 | 5006106019 | Clamp, Shutter, SS (Perforated Assembly) | View Image |
| VAR-00-678476-01 | 5006106018 | Insert, Support Shutter, SS (Perforated) | View Image |
| VAR-00-678477-01 | 5006106017 | Insert, Perforated Shutter, SS (Perforated) | View Image |
| VAR-00-682203-00 | 5006106097 | Support, Ring, Cooling | View Image |
| VAR-00-682216-00 | 5006106001 | Ring, Ceramic 6" (3280/3290) | View Image |
| VAR-00-682229-00 | 5006106096 | Insert, Piece, Pole | View Image |
| VAR-00-682232-00 | 5006106009 | Insert, Pole, Outer | View Image |
| VAR-00-682232-00 | 5006106012 | Insert, Pole, Outer, Al | View Image |
| VAR-00-682237-00 | 5006106010 | Insert, Pole, Mid | View Image |
| VAR-00-682237-00 | 5006106013 | Insert, Pole, Mid, Al | View Image |
| VAR-00-682938-00 | 5006106048 | Shield, Outer, Support, SS | View Image |
| VAR-00-682938-00 | 5006306011 | Shield, Outer, Support, Al | View Image |
| VAR-00-683155-00 | 5006106075 | Shield, Front, Plate, Curved, SS, #2 | |
| VAR-00-683155-00 | 5006106076 | Shield, Front, Plate, Curved, SS, #1 | |
| VAR-00-684046-00 | 5006101012 | Washer, Turner, SS | View Image |
| VAR-00-684046-00 | 5006101012 | Washer, Turner, SS | View Image |
| VAR-00-685958-00 | 5006306095 | Ring, Target, 3180/3190 | View Image |
| VAR-00-685965-00 | 5006306074 | Shield, Ring, Cooling, 3180/3190 | View Image |
| VAR-00674841-00 | 5006306097 | Shield, Table, (3180/3190) | View Image |
| VAR-04-715865-01 | 5006106093 | Shield, Cavity, Al, 6" | View Image |
| VAR-04-715865-01 | 5006106094 | Shield, Cavity, 6" | View Image |
| VAR-04-716197-01B | 5006306093 | Assy, Collimator, Titanium | View Image |
| VAR-04-716197-02 | 5006306091 | Assy, Collimator, Titanium | View Image |
| VAR-04-716197-02E | 5006306064 | Assy, Collimator, Titanium | View Image |
| VAR-04-716610-01 | 5006306053 | Clamp, Upper, Titanium, 200mm | View Image |
| VAR-04-717629-01 | 6006100005 | Assy, RF-Ignitor | View Image |
| VAR-5300019 | 5006102000 | Gauge, Ionization (Implanter 572) | |
| VAR-BB10157306R3 | 5006306050 | Shield, Cylinder, 200mm, SS | View Image |
| VAR-BB10157306R3 | 5006306049 | Shield, Cylinder, 200mm, Al | |
| VAR-BB10157492 | 5006306062 | Shield, Space, Dark, SS | |
| VAR-BB10157492 | 5006306063 | Shield, Space, Dark, Al | |
| VAR-BB10157641 | 5006306057 | Clamp, Lower, CDS, Al | View Image |
| VAR-BB10157641 | 5006306056 | Clamp, Lower, CDS, SS | |
| VAR-BB10157664 | 5006306065 | Shield, Bottom, Chamber, SS | |
| VAR-BB10157664 | 5006306066 | Shield, Bottom, Chamber, Al | |
| VAR-C108305001 | 5006006003 | Head, Wafer Lift 150mm,(Implanter) | |
| VAR-E17063160 | 5006306081 | Plate, End | View Image |
| 5006306089 | Ring, Cover, SS, 4" | |
| 5006106044 | Shutter, Disposable | View Image |
| 5006106053 | Ring, Cover, SS | View Image |
| 5006106070 | Shield, Isolation, SS | View Image |
| 5006106071 | Shield, Isolation, SS | View Image |
| 5006106072 | Shield, Isolation, SS | View Image |
| 5006106092 | Ring, Clip, Ceramic, 6" | View Image |
| 5006306006 | Shield, Hat, SS | View Image |
| 5006306007 | Shield, Middle, Large, SS | View Image |
| 5006306009 | Shutter, Modified, 5", Al | View Image |
| 5006306015 | Shield, Cavity, 6", SS | View Image |
| 5006306092 | Plug, Ceramic | View Image |
| 5006306104 | Shield, Ram, Lock, Load | View Image |
| 5006306105 | Port, W/2", Hat, Top | View Image |
| 5006306106 | Shield, Cover, Ram | View Image |
| 5006306109 | Shield, Block, Heater | View Image |
| 6006100007 | Assy, Plate, Pressure, Large, Al (3290) | View Image |
| 71012-001 | Cassette, Metal, Wafer, Varian, Low PC | View Image |
| 5006006008 | Shield, Shutter, SS (3190/3290) | |
| 5006006009 | Ring, Cooling (3290) | |
| 5006006010 | Shield, Shutter Improved, Al | |
| 5006006013 | Sleeve, Ceramic (Varian Implanter) | |
| 5006106006 | Ring, Ceramic 6" Nickel Plated (3280/3290) | |
| 5006106007 | Ring, Ceramic 6" (99.5) | |
| 5006106021 | Ring, Clip, Insert, SS (Varian 3280/3290) | |
| 5006106042 | Cover, Plate, Shield | |
| 5006106043 | Liner, Heater, Improved (3290) | |
| 5006106045 | Shutter, 5", Modified | |
| 5006106067 | Shield, Hat, Al | |
| 5006106068 | Tip, Actuator, Clip | |
| 5006106068 | Tip, Actuator, Clip (Vespel) | |
| 5006106077 | Shield, SS (Model 3290) | |
| 5006106079 | Shield, SS (Model 3290) | |
| 5006106081 | Shield, Heater, 4", SS | |
| 5006106084 | Shield, Heater, Cover, Back, SS | |
| 5006106085 | Shield, Heater, SS | |
| 5006306005 | Shield, Cavity, Hole, 3", SS | |
| 5006306017 | Shield, Cavity, 9", Al | |
| 5006306022 | Shutter, Disposable, SS | |
| 5006306026 | Shield, Isolation, Middle, SS | |
| 5006706000 | Diffuser, Gas, Al | |
| 6006000000 | Shutter, Perforated, SS (Assembly) | |
| 6006000002 | Kit, Shielding, Isolation, SS | |
| 6006000003 | Kit, Shielding, Isolation, Al | |
| 6006000005 | Plate, Pressure, Varian 3180 | |
| 6006100005 | Ignitor,RF | |
| 6006100009 | Assy, Plate, Pressure, Spray, Flame, SS | |
| 6006100011 | Assy, Plate, Pressure, SS | |
| 6006300000 | Shield, SS | |
