Lam

OEM PN	VTI PN	DESCRIPTION	IMAGE
2201679	5009106135	Screw, Spring, Stainless Steel	View Image
2301700	5009106144	Tube, Ceramic	View Image
2301856	5009106140	Clamp, Wafer, Ceramic, 6"	View Image
228-022-0241	5009001023	10" Deionizer Catridge	View Image
60-00134-00	6005100000	Assembly, Clamp, Retainer, &, Plunger	View Image
660-007612-001	5009105004	Supply, Power, +24 V DC - Repair
660-007613-001	5009105000	Supply, Power - Repair
660-007614-001	5009105001	Supply, Power - Repair
660-091821-003	5009105005	Power Supply, 5, 12, 15, 24V - Repair
660-098040-001	5009105009	Power Supply, 5, 12, 15, 24V - Repair
713-000032-001	5009176005	Bushing, Large, Delrin
713-000032-001	5009176001	Bushing, Vespel, Large
713-000032-002	5009176000	Bushing, Vespel, Small	View Image
713-002870-001	5009176025	Slit, Window, End Point, Teflon	View Image
713-009531-008	5009176046	Screw, Kel-F, 6-32
713-011545-002	5009176016	Guide, Spring	View Image
713-011546-002	5009176018	Sleeve, Plunger
713-011574-001	5009176052	Plunger, Wafer Clamp (A Dim=0.5)	View Image
713-011575-001	5009176015	Nut, Retainer	View Image
713-011577-001	5009176009	Washer. KEL-F, Strap	View Image
713-011578-001	5009176023	Plunger, Sleeve Guide	View Image
713-011579-001	5009176022	Stem, Plunger, Spring Guide	View Image
713-011584-001	5009176010	Plunger, Kel-F, New Style	View Image
713-011584-001	5009106011	Plunger, KEL-F, Old Style
713-011585-004	5009106102	Insert, Teflon	View Image
713-011592-001	5009176007	Washer, Kel-F, O.D., -0.625, I.D. -0.200	View Image
713-011592-002	5009176008	Washer, Kel-F, O.D., -0.625, I.D. -0.240	View Image
713-011650-006	5009106027	Ring, Focus, 6"
713-011926-001	5009176034	Cap, Clamp Retaining Bolt	View Image
713-011928-001	5009176048	Cap, Electrode Retaining Bolt	View Image
713-011980-001	5009176051	Housing, Plunger, LAM 4520	View Image
713-020911-102	5009176035	Plunger Cap, Lower Housing, LAM 4520	View Image
713-021267-001	5009176054	Pin, Clamp, Alignment, Head	View Image
713-021268-001	5009176049	Pin, Clamp, Alignment, Base	View Image
713-021875-001	5009176064	Clamp, Director, Gas, ISO, Lower
713-028485-001	5009176061	Bolt, Electrode, Ring, Clamp, Kel-F	View Image
713-031421-001	5009176089	BTN, FT, CHMBR, TP, 2300 x 10 /MPH
713-065829-001	5009176091	Cover, Cap, Screw, Liner, Inner
713-067673-002	5009106341	Pin, Alignment, Clamp
713-071084-003	5009176059	Pin, Align, Focus, Ring, ESC	View Image
713-083166-001	5009176087	SLV, ALIGN, ELCTD, Inner
713-085131-001	5009176090	Tube, Teflon, .250D, Liner, 2300
713-090498-0001	5009106313	Bushing, Door, ASI
713-090498-001	5009106229	Bushing, Door, LAM	View Image
713-090498-002	5009106312	Bushing, Large, Door	View Image
713-140136-001	5009176105	Screw Cap, ESC, 8"	View Image
713-140214-001	5009176058	Pin, Align, Focus, Ring, ESC	View Image
713-140434-001	5009106176	Pin, Index, Ring, Quartz	View Image
713-249095-001-Rev 1	5009106211	Puck, Alignment
713-250585-001	5009106149	HSG, Isolator, RF	View Image
713-330153-003	5009176040	Rod, Adjustable, Clamping, Vespel, 9600	View Image
713-330166-002	5009176042	Cover, Rod, Clamping, B.A.C. 9600	View Image
713-330311-001	5009176041	Clip, B.A.C. 9600	View Image
713-330701-001	5009176069	Cone	View Image
713-330704-001	5009176070	HSG, SPR	View Image
713-347430-001	5009176066	Support, Window, DSQ
713-540183-002	5009106190	Bushing, Lower, Peek	View Image
713-540184-002	5009106191	Bushing, Upper, Peek	View Image
714-330982-001	5009106218	Liner, Chamber	View Image
715-001147-002	5009106060	Key, 1/8" Sq. x 0.75" Lg.	View Image
715-001147-006	5009106061	Key, 1/8" Sq. x 3.00" Lg.	View Image
715-004154-001	5009101005	Screw, Ring, Retaining
715-006310-001	5009106123	Spacer
715-006362-006	5009106122	Screw, #8, Anodized
715-006436-001	5009106008	Barrier, Ion, Pll
715-007469-002	5009106083	Electrode, Aluminum	View Image
715-008282-001	5009106110	Ring, Clamping
715-008331-001	5009001021	Filter, Millipore
715-008721-001	5009106078	Cathode, Aluminum	View Image
715-008721-101	5009106316	Cathode, Aluminum	View Image
715-009161-001	6005000044	Lifter, Wafer	View Image
715-009185-001	5009106333	Finger, Lower, Load Lock 2	View Image
715-009185-002	5009106331	Finger, Lower, Load Lock 1	View Image
715-009191-001	5009106332	Finger, Upper, Load Lock 2	View Image
715-009191-001	5009106330	Finger, Upper, Load Lock 1	View Image
715-009194-001	5009106328	Finger, Lower, Load Lock, Short
715-009212-001	5009106329	Finger, Upper, Load Lock, Short	View Image
715-009306-005-Rev C	5009126000	Ring, Focus, Lower, 4"	View Image
715-009306-006	5009106076	Ring, Focus, 6", Ceramic	View Image
715-009306-006	5009106077	Ring, Focus, Aluminum, 6"	View Image
715-009779-002	5009106317	Electrode, Cap, 490 Lower
715-011116-002	5009106062	Sleeve, Adjust, Nut	View Image
715-011125-001	5009001001	Sprocket, Idler
715-011148-002-A	6005000004	Assy, Arm, Tensioner, Chain	View Image
715-011531-016	5009106304	Electrode, 200mm, Anodized, Aluminum	View Image
715-011563-161	5009106003	Clamp, Wafer, Domed, Ceramic, 6"	View Image
715-011565-001	5009106024	Bolt, Clamp, Retaining	View Image
715-011565-002-Rev C	5009106069	Screw, Vent, #10-32, Pasivated, SS	View Image
715-011585-001	5009176020	Cover, Clamp, Bolt
715-011622-101	5009106159	Lifter, Wafer, 4 Pin, Flexible	View Image
715-011622-201	5009106314	Lifter, Wafer, 4-Pin
715-011640-001	5009106002	Ring, Focus, Lower, Aluminum, Black Anodized	View Image
715-011640-001	5009106004	Ring, Focus, Lower, Ceramic	View Image
715-011746-161-Rev C	5009106029	Clamp, Wafer, Aluminum	View Image
715-011746-161-Rev C	5009106036	Clamp, Wafer, Ceramic, 6	View Image
715-011925-001	5009106022	Bolt, Retaining, Clamp	View Image
715-011927-001	5009106023	Bolt, Electrode, Clamp, Ring	View Image
715-011982-001	5009106132	Plunger Cap, Lower Housing, LAM 4520	View Image
715-012233-003	5009106216	Gate	View Image
715-018991-208	5009106305	Electrode, Aluminum, 200mm	View Image
715-026182-001	5009106145	Electrode, Upper, Aluminum	View Image
715-030136-003A	5009106125	Ring, Edge, ESC, 6"	View Image
715-030136-004	5009106236	Ring, Edge, ESC
715-068403-008	5009106339	Screw, Lock, Cam
715-075954-003	5009106338	Washer, Hex, Ring, Clamp, 300mm
715-11116-002	5009106062	Sleeve, Nut, Adjust	View Image
715-140286-001	5009106178	Ring, Focus, 6"
715-160153-002	5009106275	Plate, DSQ, Hinged
715-160153-003	5009106248	Plate, Mounting, Match, DSQ
715-250516-001-Rev 1	5009106141	Clamp, Upper
715-250588-001-Rev E2	5009106142	Clamp, Lower
715-250599-001	5009106146	Diffuser, Upper, Electrode	View Image
715-250672-001-Rev A	5009106137	Sleeve, Teflon
715-250717-001	5009106147	Electrode, Upper, 150mm
715-330152-003-Rev 1	5009106104	Housing, Spring, Adjustable	View Image
715-330302-001	5009106283	Seal R, Feed, Gas
715-330312-001	5009106105	Ring, Retaining, Clip	View Image
715-330394-002	5009106221	Bracket, Chamber	View Image
715-330406-001	5009106284	Clip, Retaining, Feed, Gas
715-330706-001	5009106250	Plate, End	View Image
715-330928-002	5009106215	Liner, Port, Turbo	View Image
715-330981-001	5009106214	Liner, Window, Endpoint	View Image
715-330984-001	5009106235	Ring, ESC, Gap, Fixed, Injector, Gas, Bottom
715-331211-001	5009106167	Liner, Chamber, Recoat Aluminum Oxide	View Image
715-360197-001	5009106170	Gasket, VCR, Drilled	View Image
715-370861-026	5009106336	Orfice, Cylinder, 55 Holes Dia. 0.052"
715-495022-001	5009106220	Screw, Non-Vented
716-005124-001	5009106153	Window, Quartz, Rear	View Image
716-005773-006	5009106042	Ring, Focus, Electrode
716-006721-001	5009106001	Ring, Insulator, Ceramic, Large	View Image
716-006753-001	5009106000	Insulator, Ceramic	View Image
716-006753-001	5009106038	Insulator, Ceramic
716-011009-001	5009106150	Window, Quartz	View Image
716-011533-001	5009106065	Window, Quartz, Gap Insulator
716-011563-161	5009106143	Clamp, Wafer, Domed, 6"
716-011563-162	5009106009	Clamp, Domed Ceramic, 6"	View Image
716-011570-001	5009106030	Filler, Orifice, w/c Ceramic	View Image
716-011571-001	5009106066	Washer, Turn, 1/4"	View Image
716-011571-001	5009176021	Washer, Ceramic
716-011572-001	5009106020	Clamp, Retainer	View Image
716-011573-001	5009106019	Plunger, Ceramic	View Image
716-011573-004	5009106064	Plunger, Ceramic	View Image
716-011638-006	5009106007	Ring, Focus, Ceramic	View Image
716-011638-008	5009106116	Ring, Focus, Thin	View Image
716-011749-006	5009106032	Ring, Lower, Electrode	View Image
716-011759-016	5009106010	Ring, Mounting, Ceramic	View Image
716-011922-001	5009106072	Ring, Electrode, Ceramic	View Image
716-011923-001	5009106071	Ring, Plunger, Ceramic	View Image
716-011981-001	5009106131	Plunger, Clamp Wafer, Lower	View Image
716-021873-001	5009106241	Disc, Director, Gas
716-021874-001	5009106240	Leg, Director, Gas
716-028123-002-Rev 1	5009106091	Ring, Filler, Ceramic	View Image
716-028414-015-Rev 1	5009106090	Ring, Focus, Ceramic	View Image
716-028668-262	5009106087	Wafers, Clamp, Shadow, 6"	View Image
716-028678-261	5009106085	Wafers, Clamp, Shadow, 6"	View Image
716-028688-261	5009106205	Ring, Equipment	View Image
716-028721-262	5009106112	Wafers, Clamp, Shadow, 6"	View Image
716-028721-281	5009106115	Clamp, Shadow, Ceramic, 8"	View Image
716-029435-006	5009106089	Ring, Electrode, Ceramic	View Image
716-030135-001	5009106213	Ring, Edge, 8"	View Image
716-030136-001	5009106158	Ring, Edge, ESC, 6"	View Image
716-031052-001	5009106152	Window, Point, End, Quartz
716-071295-003	5009106231	Pin, Lift
716-140141-001	5009106238	Ring, Hot, Edge, 6", ESC, Deg, 15
716-160255-002	5009106067	Chamber, Plasma, Quartz	View Image
716-250080-001	5009106169	Insulator, Upper, 150MM	View Image
716-330045-004	5009106207	Ring, Focus, 8"	View Image
716-330045-261	5009106160	Ring, Edge, ESC 6"	View Image
716-330061-006	5009106070	Ring, Baffel, Ceramic	View Image
716-330167-161	5009106088	Clamp, Shadow, TCP	View Image
716-330167-281	5009106079	Clamp, Ring, Bottom, 8"	View Image
716-330355-002	5009106166	Window, Endpoint, Quartz	View Image
716-330504-064	5009106113	Ring, Focus, Ceramic	View Image
716-330890-001	5009106208	Ring, Base, Ceramic	View Image
716-331099-001-Rev B	5009106239	Ring, Quartz, Focus Edge, LAM 9400
716-443083-004	5009106181	Ring, Confinement, Top	View Image
716-443084-003	5009106184	Ring, Confinement, Bottom	View Image
718-106722-001	5009101011	Washer, Nordlock
718-443144-006	5009106194	Screw, Peek	View Image
720-000930-020	5009001018	Screw, Cap, 6-32
720-009530-008	5009176014	Screw, Kel-F, 1/4 - 20 x 0.5", Lg., FHSL	View Image
720-009530-016	5009176050	Screw, FHSL, Kel-F, 1/4-20	View Image
720-009531-004	5009176019	Screw, #6-32 x 1/4, Kel-F	View Image
720-009531-006	5009176074	Screw, HD, Flat, 6-32 x 0.38, Kel-F	View Image
720-009531-008	5009176046	Screw, Kel-F, 6-32x17/40, FHSL	View Image
720-009531-010	5009176043	Screw, FLT HD, 6-32 Kel-F 5/8" LGTH	View Image
720-009531-016	5009176013	Screw, Kel-F, #6-32 x 1" Lg. FHSL	View Image
720-009532-010	5009176071	Screw, Flathead, 6-32 x 5/8", Vespel	View Image
720-090685-010	5009106290	Screw, Flathead, 4-40 x .63" Teflon	View Image
720-090943-010	5009176036	Bolt, Confinement Ring, Kel F, LAM 4520	View Image
720-092759-016	5009106118	Screw, Ring, Confinement, Vespel	View Image
720-093814-008	5009176063	Screw, Vespel, 6-32x0.50
720-093815-006	5009176062	Screw, Vespel, 6-32x0.38
720-093867-005	5009001017	Screw, Set, 9600
720-094109-012	5009176012	Screw, Kel-F, #10-32 x 3/4", Lg., SHCS	View Image
720-098325-004	5009106252	Screw, Flathead, Soc, Titanium, Vented, 8-32 x 1/4
720-443096-014	5009106196	Screw, Nylon	View Image
720-443208-010	5009106193	Screw, Baffle, Peek	View Image
721-093884-006	5009106285	Washer, Belleville, O.D., 0.317	View Image
721-250695-001	5009106134	Washer, 1/4", Stainless Steel
722-000966-002	5009001014	Nut, Hex, Jam, 1/4-20, S/S
722-009637-001	5009176017	Nut, Hex, Kel-F, #10-32 Thru	View Image
723-007749-001	5009001008	Spacer, Shaft, 1/4"OD
726-001046-001	5009001012	Ring, Retaining
726-250712-001	5009106138	E-Clip, SS
734-004078-001	5009106044	O-Ring, Motor, Indexer
734-006338-001	5009102041	Seal, Quad, Q4010
734-007359-001	5009102025	Seal, Chamber
734-007369-001	5009102060	O-Ring, Quad
734-007762-001	5009102040	Seal, Quad, Q4445
734-061280-109	5099202087	O-Ring, Line, Gas, Window, TCP
734-061280-281	5099202246	O-Ring, Viton
734-091193-001	5009102049	O-Ring, Viton
734-091993-001	5009102037	O-Ring, Silicon
734-091993-001	5009102052	O-Ring, Flouro Silicon, Window, Quartz
734-091993-001	5009106098	O-Ring, Flouro Silicon
734-091994-001	5009102033	O-Ring, Flouro Silicon, Cover, PLL
734-091994-001	5009106101	O-Ring, Flouro Silicon
734-091995-001	5009106096	O-Ring, Flouro Silicon
734-092038-001	5009102038	O-Ring, Silicon
734-092038-001	5009106099	O-Ring, Flouro Silicon
734-092040-001	5009102054	O-Ring, Flouro Silicon, Door, Outer, DSQ
734-092040-001	5009102088	O-Ring, Flouro Silicon, Door, Inner, DSQ
734-092040-001	5009106100	O-Ring, Flouro Silicon
734-092040-001	5099202088	O-Ring, Flouro Silicon, Door, Inner, DSQ
734-092041-001	5009102048	O-Ring, Silicon
734-092041-001	5009102051	O-Ring, Flouro Silicon, Spacer, Quartz
734-092041-001	5009106097	O-Ring, Flouro Silicon
734-092107-001	5009102086	O-Ring, Seal
734-092561-278	5099202251	O-Ring, FSI
734-093789-001	5009106094	Seal, O-Ring, Gate, Chamber
734006000-001	5009102029	O-Ring, Flouro Silicon
734092038-001	5009102055	O-Ring, Flouro Silicon, Ring, Gas, Outer, DSQ
739-000421-001	5009102072	Seal, .750
739-007783-001	5009002002	Seal, Quad, Q4454
746-001125-001	5009101004	Bearing, Thrust, 1/4" ID
746-007608-001	5009101003	Washer, Thrust, .25" x .060"
746-007652-001	5009001004	Bearing, 15M, Cont, Angle, Row, Double
746-090156-001	5009001011	Bearing, Flanged, Shielded, Double
750-001127-001	5009001009	Chain, Roller, Link #25, Offset
750-002176-001	5009001007	kit, Master-Link #25
750-007781-001	5009001006	Chain, Roller, 52.00", SST, #25
750-007782-001	5009001010	Chain, Roller #35, 15.75" Lg.
750-090192-001	5009001002	Link, Master, SST, #35
752-000224-008	5009106107	Pin, Roll, 3/32 x 1/2 Lg.
752-000236-001	5009106108	Pin, Roll, 1/8 x 3/4
752-002045-005	5009106109	Pin, Roll, 1/16 x 3/8
752-007513-001	5009101006	Key, 3/32x0.60
754-007751-001	5009001015	Spring, Tensioner, SS
754-009002-015	5009101009	Spring, Compression, SST
754-009002-015	5009101009	Spring, Plunger, Assy, 30 lbs.
754-090359-015	5009101010	Spring, Compression, SST	View Image
754-090457-014	5009101008	Spring, Clamp, Retaining
754-091624-001	5009101007	Spring, Lower Plunger, LAM 4520
754-092082-002	5009001024	Bearing, Guide, w/Spring, Leaf
754-093243-006	5009001016	Spring, Cprsv, Wire, 9600
754-093243-006-Rev 1	5009001016	Spring, Assembly, Plunger, 9600
754-250529-001	5009106136	Spring, Screw, Shoulder
756-007809-010	5009001013	Screw, Schd, Shldr, 10-32
765-007786-001	5009001003	Sprocket, Driven, 1.214 Pd
766-008456-001	5009002000	Valve, Air
790-006301-001	5009176055	Lifter, Chamber, Back-up	View Image
790-008882-195	5009102066	Belt, Drive, Harmonic, XLL, Small
790-008882-205	5009102067	Belt, Drive, Harmonic, XLL, Large
790-092080-002	5009001022	Bearing, Lock, Over
790-092081-001	5009102087	Bolt, Crank
796-002672-001	5009102058	Gasket, Nupro
796-002673-001	5009102059	Stem, Nupro
796-002673-001	5009102064	Tip, Nupro
796-006633-009	5009101012	Screw, Vented, Electrode
796-028633-010	5009126003	Screw, AL, Plate, Baffle
796-098648-001	5099202249	O-Ring, Seal, Gate
839-012255-001	5009106255	Bellows, Gate, Inner
839-012255-001	5009106256	Repair, Bellows, Gate, Inner
839-031766-001	5009106279	Bellows, Lifter
839-080830-001	5009106340	Assembly, Screw, Jack
839-249332-001Rev E1	6005000032	Housing, Pin, SiC, SS	View Image
839-330303-001	5009106282	Weldment, Elbow, Fitting, Gas, Gap, Fixed
839-470315-001	5009126006	Cap, Gas
852-011060-001	6005000008	Kit, Gap
852-011060-xxx	6150000009	Kit, Sub-Assy, PM, Motor, RF, Gap
852-011061-001	6150000016	Kit, Sub-Assy, PM, Housing,Chamber, Electrode, Lower
852-011061-001	6150000018	Kit, Sub-Assy., PM, Housing, Chamber, Lower
852-012525-001	6150000020	Kit, Sub-Assy., PM, Spinner, Lifter
853-011555-001	6150000010	Kit, Sub-Assy, PM, Electrode, Upper
853-012100-003	6150000008	Kit, Sub-Assy, PM, Housing, Arm
853-012123-001	6150000012	Kit, Sub-Assy, PM, Housing, Chamber, Upper, Oxide
853-012200-002	6150000007	Kit, Sub-Assy, PM, Gate
853-017230-001	5009105006	Power Supply, 5, 12, 24V - Repair
853-025051-010	5009105010	Power Supply, Housing Escape - Repair
853-025054-010	5009105010	Power Supply, Housing Escape, Repair
853-250784-001	5009106212	Puck, Alignment
853-330721-001	6005000064	Assy, ACTR, JD, BAC
853-441511-001-Rev 1	5009126005	Plate, Cap, Gas
857-010229-001	6005000010	Puck, Alignment	View Image
860-010113-001	6150000017	Kit, Sub-Assy, PM, Housing, Loadlock, Exit
	5009106058	Arm, Tensioner, Chain	View Image
	5009106059	Arm, Tensioner, Chain, Pin	View Image
	5009106133	Ring, Clamp, Aluminum	View Image
	6005000010	Assy, Puck, Alignment, 0.30"	View Image
	6005000011	Assy, Puck, Alignment, 1.1"	View Image
	6005000016	Kit, PM, Plunger, 9600	View Image
	5009001000	Sprocket, Driven, 2.873 Pd
	5009100000	Clamp, Plunger & Retainer, Ceramic (4420)
	5009105007	Power Supply, +24V / 25A - Repair
	5009105008	Power Supply, +/- 5, 15, 12, +24V - Repair
	5009106114	Window, Block, Sapphire
	5009176004	Bushing, Small, Delrin
	6005000003	Kit, Plunger Assembly, Kel-F
	6005000009	Kit, Plunger, Ceramic
	6005000015	Kit, PM, Wet, DSQ, 9600
	6005000019	Kit, Clean, Chamber, 9600
	6005000020	Kit, PM, A, Level
	6005000021	Kit, PM, B, Level
	6005000022	Kit, PM, C, Level
	6005000023	Kit, PM, D, Level
	6005000030	Kit, PM, 490/590
	6005000031	Kit, Plunger, Long
	6005000047	Kit, PM, Rainbow, model 4528
	6005000048	Kit, Plunger
	6005000054	Kit, PM, Chamber, Main, 9600
	6005000057	Kit, PM, Plunger, 4500
	6005000059	Kit, Cap, Bolt, Retaining, Clamp

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