Novellus

OEM PNVTI PNDESCRIPTIONImage
02-00008-006001000038Assy, Adjustment, Head, Gas
02-00008-016001000073Kit, Gas Head Adjustment, C1
02-00163-006001000047Kit, Assembly, Fork, Spindle
02-032454-006001000075Kit, Distribution, Plate, Gas
02-033644-006001000045Kit, PM, Chamber Top, V-Port, SPDView Image
02-111903-006001700002Assembly. Feedthru, RFView Image
02-119726-006001000077Sequel Express Anti-deflection Assy
02-130205-006001700007Gate, L-Type
02-257926-006001700020Feedthru, AC
05-000024-006001000053PM, Kit, Heater, Conn Dual FrequencyView Image
05-00005-006001000046Kit, PM, Retro, 1P, Heater, Replacement
05-00007-006001000052Kit, PM, Chamber, Reacter
05-00013-006001000049Kit, PM, Overhaul, Spindle
05-00024-006001000010Kit, PM, Heater, Frequency, DualView Image
05-114025-006001700017Kit, Shim
05-11902-006001000066Kit, Upgrade, Strap, Feedthru, RFView Image
15-00019-025015006311Off, Blank, ViewportView Image
15-00027-025015006047Guide, Nozzle AdjusterView Image
15-00043-025015006054Adjuster, Ceramic, Gas PlateView Image
15-00093-00 Rev.G5015006050Panel, Lock, LoadView Image
15-00126-005015006034Strap, Heater Ground, AluminumView Image
15-00229-00 Rev.B5015006048Nut, Hex, 1/2 - 20, AluminumView Image
15-00309-005015006172Hanger, Nozzle, 200mmView Image
15-00309-015015006077Hanger, Nozzle, 1.50" (200mm)View Image
15-00309-01 Rev. J5015006119Screw, Head, GasView Image
15-00311-005015006022Nut, Cap, 1/4-20, NiView Image
15-00341-005015006041Screw, HexHd, 1/4 - 20 x 1/4", NiView Image
15-00371-005015006035Nut, Hex, 1/4 - 20, NiView Image
15-00371-005015006057Nut, Hex, 1/4 - 28, NiView Image
15-00372-005015006016Washer, Flat, 1/4", NiView Image
15-00385-005015006017Nut, Hex, 10-32, NiView Image
15-00386-005015006010Washer, #10, NiView Image
15-00386-00 Rev. D5015006081Washer, w/Flat, #10, NiView Image
15-00398-005015006075Screw, Support, HeaterView Image
15-00399-025015006020Screw, 8-32 x 0.96", NiView Image
15-00399-035015006018Screw, Spindle, TopView Image
15-00399-045015006019Screw, Spindle, Top 1.02LGView Image
15-00399-055015006013Screw, Spindle, Top 1.12LGView Image
15-00401-005015006123Shaft, SpindleView Image
15-00409-005015066002Window, QuartzView Image
15-00416-005015006147Flange, Ring, Spacing, 4"View Image
15-00457-005015006021Screw, Strap, Heater, 10-32 x 0.25", NiView Image
15-00475-00 Rev.D5015006015Insulator, Gas Feedthru, CeramicView Image
15-00479-005015006177Gear, GenevaView Image
15-00553-055015006027Shim, Heater, .005", FlatView Image
15-00553-105015006028Shim, Heater, .010", FlatView Image
15-00553-185015006195Shim, Heater, 0.018 FlatView Image
15-00553-255015006200Shim, Flat, 0.025View Image
15-00553-315015006029Shim, Heater, .031", FlatView Image
15-00554-055015006025Shim, Heater, .005", V-TypeView Image
15-00554-105015006024Shim, Heater, .010", V-TypeView Image
15-00554-185015006196Shim, Heater, 0.018", V-TypeView Image
15-00554-255015006201Shim, V Typw, 0.025View Image
15-00554-315015006026Shim, Heater, .031", V-TypeView Image
15-00558-015015006052Sleeve, Lead, Htr, 2.00", CeramicView Image
15-00558-025015006053Sleeve, Lead, Htr, 2.75", CeramicView Image
15-00567-005015006031Cap, TC, 1/8" ID, CeramicView Image
15-00578-00 Rev.D5015006083Sleeve, Flanged, Feedthru, Htr, CeramicView Image
15-00614-005015006030Cap, TC, 1/16" ID, CeramicView Image
15-00653-005015006186Spindle Hub Mount ClampView Image
15-00654-005015006002Clamp, Adjustment, Rotation View Image
15-00684-005015006098Cap,TC,1/16"ID,CeramicView Image
15-00685-005015006046Feedthru, O-Seal, 3/8", UltraTorrView Image
15-00686-00 5015006049Washer, Feedthru, 1/2" ID, AluminumView Image
15-00698-005015006012Screw, ForkView Image
15-00699-015015006007Finger, Fork, 7.5"View Image
15-00700-005015006105Plate, Retainer, Fork, BottomView Image
15-00701-005015006001Fork, Plate, Bottom View Image
15-00702-005015006106Plate, Retainer, Fork, Top View Image
15-00703-005015006000Fork, Plate, Top View Image
15-00721-005015006036Washer, #8 NiView Image
15-00729-005015006003Clamp, FlatView Image
15-00731-005015006006Bushing, Keyed, CeramicView Image
15-00742-005015006280Tube, TC, Ceramic
15-00839-005015006132Screw, Ni 1/4-20 x .9 LGView Image
15-00866-005015006127Spring, CeramicView Image
15-00932-005015006107Screw, 1/4-20 x .50" LG, Nickel (Concept Two)View Image
15-00935-015015006263Screw, 10-32 X .5, Ni View Image
15-00935-01 (Mod.)5015006162Screw, Hex, Socket, NickelView Image
15-00951-005015006014Cup, Screw CoverView Image
15-00982-005015006167Shaft, SpindleView Image
15-01103-00 Rev A5015006171Shaft, Lift, RingView Image
15-01104-005015006110Screw, 10-32 x .75, Nickel 200View Image
15-01104-005015006129Screw, 10-32 x .75, Ni (0.100 Shoulder)View Image
15-01127-005015006360Paddle, Optical. 200mm
15-024611-00 Rev. C5015006161Arm, RobotView Image
15-024881-005015006155Fork, End, CapView Image
15-028766-005015006125Ring, Guard, 200mmView Image
15-032014-005015066004Window, Quartz, Etch ResistantView Image
15-032014-015015066003Window, Quartz, EP OptionView Image
15-032016-005015006178Pin, Insert, CeramicView Image
15-032451-005015006126Window, Chamber, LexanView Image
15-032452-005015006126Window, Lexan, ChamberView Image
15-032502-005015006111Pin, Lift, WaferView Image
15-032503-005015006291Ring, InsulatorView Image
15-032631-00 5015006080Flange, KeyedView Image
15-032777-005015006118Ring, Moer, 2.00View Image
15-032939-005015006169Ring, Moer, 2.25mmView Image
15-033278-005015006144Ring, V-Port View Image
15-033279-005015006145Viewport, LexanView Image
15-033874-005015006142Plug, Injector, ManifoldView Image
15-033947-005015006124Plate, Cover, 200mm (P.E.C.)View Image
15-034333-005015006117Tube, Injector, ProcessView Image
15-034851-005015002058Bushing, SplitView Image
15-046056-005015006112Bolt, Vented, 1/4-20 x 1.0" , NiView Image
15-046056-005015006109Bolt, Non-Vented, 1/4-20 x 1.0" NiView Image
15-046814-005015006290Ring, Manifold, ChamberView Image
15-050160-155015006227Tube, Ceramic, 1.5"View Image
15-050160-205015006286Tube, Ceramic, 2"
15-050160-415015006334Tube, Injector, 4"
15-051711-255015006149Tube, Ceramic, 2.5"View Image
15-051711-305015006329Tube, Injector, 3"
15-052375-005015006205Finger, Ceramic, Plate, TransferView Image
15-052619-00 Rev.D5015006099Tong, Ceramic,8"View Image
15-053271-025015006192Tube, Injector, Gas, CleanView Image
15-053394-01 Rev.A5015006082Finger, Fork, Ceramic, MCView Image
15-053394-02 Rev.A5015006121Finger, Fork, Ceramic, MC, 200mmView Image
15-053394-03 5015006157Finger, Fork, Ceramic, MC, 200mm--New StyleView Image
15-054434-01 REV A5015006215Ring, Moer, 3.0mmView Image
15-054434-025015006168Ring, Moer, 1.50mmView Image
15-054434-035015006274Ring, Moer, 2.5mm
15-054577-005015006204Holder, Wafer, Ring, MoerView Image
15-054583-005015006203Clip, Retaining, Holder, MoerView Image
15-054585-005015006206Ring, Moer, 2.25mmView Image
15-055720-005015001002Ring, SpacerView Image
15-055721-005015002033Bushing, SplitView Image
15-100603-005015006202Insulator, Distribution, GasView Image
15-101482-005015006138Fork, Top Plate, A, AntideflectView Image
15-101482-015015006140Fork, Top Plate, AntideflectView Image
15-101482-025015006151Fork, Top Plate, AntideflectView Image
15-103651-005015006285Ring, Guard, PocketedView Image
15-103651-005015006164Ring, Guard, Hi Purity, 200mm
15-103913-015015006101Feedthru,Copper, (Upgrade)View Image
15-103913-025015006096Clamp, Strap, FeedthruView Image
15-103913-035015006189Sheath, TeflonView Image
15-103913-045015006194Sheath, Teflon, FeedthruView Image
15-10489-005015006174Mount, Slide, WindowView Image
15-107698-005015006083Sleeve, Flanged, Feedthru, Htr, CeramicView Image
15-108174-005015006102Cup, Cover, ScrewView Image
15-108307-005015006095Clamp, Strap, RFView Image
15-110411-005015066007Window, Sapphire, Pure, ThinView Image
15-11085-00 Rev A5015006253Mount, Sensor, BottomView Image
15-11188-005015006188Window, ZeluxView Image
15-113064-005015006137Nozzle, Injector, Speed-SView Image
15-113064-006001700010Nozzle, Injector, Speed-S
15-114331-005015006094Screw, Cap, Nickel, 1/4-20 x 0.5View Image
15-119059-005015006159Screw, Cap, Nickel, 1/4-20 x .25lgView Image
15-120150-015015006193Tube, InjectorView Image
15-122178-005015006207Ring, Carrier, Spindle, UpperView Image
15-122178-00 Rev A5015006264Carrier Ring, 300mmView Image
15-123086-015015006191Tube, Injector View Image
15-130746-015015006185Fork, Dimple, CeramicView Image
15-134732-005015006301Hub, 200mm, PED, Lift, ConcentricView Image
15-151156-005015006338Window, Endpoint, LexanView Image
15-156718-005015006176Ring, Moer, 1.0mmView Image
15-161439-005030000011Iridia Isolator PlateView Image
15-162662-005015006352Bracket, Strap, Dome, Speed
15-250025-005015006251Insert, MESCView Image
15-250878-005015006182Screw, Ceramic, 300mmView Image
15-252549-005015006356Rail, Dome, Speed/C3
15-258837-005015006320Clamp, Strap, RF, 3.5", AluminumView Image
15-259022-205015006225Injector, Sapphire, Solid, 0.020View Image
15-259022-215015006219Injector, Sapphire, Solid, 0.021View Image
15-259022-225015006220Injector, Sapphire, Solid, 0.022View Image
15-259022-235015006221Nozzle, Injector, SpeedView Image
15-259022-245015006226Injector, Sapphire, Solid, 0.024View Image
15-266840-005015006336SCW, Hd, Hex, Lg, 3/8-32x 2.02", SST
15-277384-005015006345Spacer, MPP
15-290624-005015006294Insert, Split, Inner, C2View Image
15-292284-555015006305Orifice, 0.0155", Nozzle, Nickel, RubyView Image
15-292284-565015006306Orifice, 0.0165", Nozzle, Nickel, RubyView Image
15-300579-005015006303ACP, Nozzle, Ceramic, 300mmView Image
15-307812-005015006105Plate, Fork, BottomView Image
15-307813-005015006106Plate, Fork, TopView Image
15-314171-005015006326Ring, MOER, Classic, LG
15-317925-005015006304Orifice, Blank Off, Nickel, 300mm
15-325835-005015006001Plate, Fork, BottomView Image
15-325836-005015006000Plate, Fork, TopView Image
15-362611-005015006317Retainer, Holder, Captured Lift PinView Image
15-386933-005015006309Spring, Door, Lock, Load
15-401165-165015006307Orifice, 0.0160", Nozzle, Nickel, RubyView Image
16-00092-005015006044Strap, Heater, InsulatedView Image
16-00092-005015006084Strap, Heater, Angled, InsulatedView Image
16-00098-005015006043Strap, Heater, Insulated, Long, StandardView Image
16-00098-005015006166Strap, Heater, Insulated, Long, EZView Image
16-033931-006001700011Showerhead, 200mmView Image
16-033932-006001700003Showerhead, 150mmView Image
16-271392-006001700025Showerhead, 300mm
17-00094-005015006032Strap, Bias, LF, Aluminum  View Image
17-00094-015015006103Strap, LF Bias, AluminumView Image
17-00148-00 Rev. D5015006011Spring, ForkView Image
17-032018-005015006181Screen, RFView Image
17-101596-005015006139Retainer, ForkView Image
17-103987-005015006092Strap, RF  View Image
17-258841-005015006321Strap, Power, RFView Image
17-311636-005015006335Bracket, Mounting PlateView Image
19-00056-006001700001Assembly, Feedthru, HeaterView Image
19-00056-006101000009Sub-Assembly, Feedthru, RF, RefurbishmentView Image
19-00266-015015704005Motor, ExtView Image
19-00267-015015704006Motor, RotationView Image
19-00268-015015704004Motor, LiftView Image
19-00273-005015006108Washer, Spring, ModifiedView Image
19-034573-045015001013Bearing, WTM, Linear/Rotary 1"
20-00064-005015001019Spring, Compression, 7/8"x0.36"
20-00153-005015006058Ball, Support, Heater,Ceramic, 2"View Image
20-00212-005015006079Nut, 8-32, AluminumView Image
20-00221-005015006085Washer, #8, Flat, AluminumView Image
20-00222-005015006104Washer, Flat, 1/4", AluminumView Image
20-00224-005099010000Washer, .920OD x .200, D
20-00232-005015006116Washer, Flat, 1/4" ID, Brass
20-00244-005015006115Nut, Hex, 1/4-20, BrassView Image
20-00248-005015001009Bearing  
20-00248-005099010001Spacer, #5 Shaft x 0.060" TK
20-00249-005015001008ScrewView Image
20-00249-005015006209Screw, Shoulder, 4-40x5/32"
20-00257-005015006268Washer, Spring, 1.25ODView Image
20-00428-005015006218Ring, Retainer
20-00452-005015006134E-Ring, 1/2"View Image
21-00064-005099010003Washer, Flat, #10 View Image
21-250660-005015006292SCRW, SKT, Hex, 1/4-28x0.5", SST, VentView Image
21-282771-005015006325SCRW, SKT, HEX, 8-32 X .38", Ni, Vented
22-00206-005015001007Bearing, WTM, Linear/Rotary 1"View Image
22-00288-005015001010Bearing
22-00288-005015002023Seal, T, Spindle
22-00299-005015002031O-Ring, T-Seal
22-00299-005015006210Bearing, Cam, Follower
22-00324-005015002008Seal, Lip, Indexer
22-00324-005015702000Seal, Lip
22-00325-005015002007Seal, Outer Lip, Indexer
22-00326-005015002004O-Ring, Viton, Door, Cassette
22-00342-005015002073Nut, 3/8" O-Seal (UltraTorr)
22-00343-005015002045Sleeve, 3/8" O-Seal, UltraTorr
22-00417-005015001004Gasket/ Retainer, VCR, 1/4, NickelView Image
22-00612-005015702011Valve, VCR, Female, 1/4", NC, Springless
22-028206-005015006133Screw, Skt, Hex, 10-32 x0 .5,Vented,Nickel PlatedView Image
22-046263-005015006148CouplingView Image
22-101315-005015001001Spacer, Bushing, Split, SpindleView Image
22-112017-005015006113Washer, Flat, BrassView Image
22-112018-005015006114Nut, Hex, 1/4-28, BrassView Image
22-266894-005015006308Seal, Metal, Face, Gas, 300mmView Image
27-00010-015015702005Thermocouple, Type J, 1/8"
27-10114-006001700020Feedthru, AC
31-034241-005015006315Shielding, RF Fingers, Soft
34-00133-005015006070Seal, Feedthru, Elec, TeflonView Image
60-00091-005015001020Cylinder, Pneumatic, Spindle Shaft
79001-1006Tool, Alignment, 8", ModifiedView Image
79001-1008Tool, Alignment, 6", ModifiedView Image
5015006216PEC
5015006255Door, Speed, 261
5099202222O-Ring, Flouro Silicon
5099202223O-Ring, Flouro Silicon
6001000000Kit, Upgrade, Load, Ceramic 
6001000001Kit, PM, Heater
6001000002Kit, PM, Day, 30
6001000003Kit, PM, Day, 90 
6001000004Kit, PM, Day, 180 
6001000006Kit, O-Ring
6001000007Kit, PM, Quarterly
6001000008Kit, Concept One, Shower Head, Kalrez
6001000009Kit, Concept One, Shower Head, Viton
6001000011Kit, PM, Day, 30
6001000012Kit, PM, Rebuild, Spindle
6001000013Kit, PM, Replacement, T-Seal
6001000014Kit, PM, Loadlock, Day, 180
6001000016Kit, PM, Seal, Chamber, Process, 90 Day
6001000018Kit, PM, Clean, Wet, Day, 180
6001000019Kit, PM, Clean, Wet, Day, 90
6001000020Kit, PM, Wet, Day, 30
6001000021Kit, Replacement, Head, Shower
6001000022Kit, PM, Quarterly
6001000024Kit, PM, Seal, Annual
6001000026Kit, PM, Semi-Annual
6001000028Kit, PM, Seal, Day, 30
6001000031Kit, PM, Strap, Bias, LF
6001000032Kit, PM, Hardware, Nickel
6001000033Kit, PM, Strap, RF, Heater
6001111363Kit, PM, Replacement, Mount, Showerhead
6001000062Kit, O-Seal
6001000064Kit, PM, Speed
6001700013Tool, Removal, Spindle
6001700014Tool, Removal, Spindle
6101000004Kit, PM, Hardware  
6101000011Kit, PM, Heater
6101000012Kit, Rebuild, Spindle
70005-4402Handle, Cassette, 6"
71001-3300Cassette, 6"
71001-3400Cassette, 8"
72004-3000Cart, PM
79001-1003Tool, Alignment, Showerhead, 6" Schematic
79001-1004Tool, Alignment, Showerhead, 8" Schematic
79001-1005Tool, Alignment, Showerhead, 8", Maxus Schematic