| OEM PN | VTI PN | DESCRIPTION | |
|---|---|---|---|
| 1000936 | 5037106031 | Grid, Clamp, A3 ICP HT CIR | |
| 1001468 | 5037106040 | Ring, Shield, O-Ring, Suprema | |
| 1001469 | 5037106041 | Shield, O-Ring | |
| 053-00017-0 | 5037106005 | Flag, Down | View Image |
| 062-00003-0 | 5037106011 | Pin, Heater | View Image |
| 062-00021-0 | 5037106012 | Bracket,Element,Heater | View Image |
| 062-00023-0 | 5037106001 | Strap | View Image |
| 062-02000-0 | 5037106014 | Strap, Al, Solid, Short, Modified | |
| 062-02000-0 | 6042100000 | Strap, Aluminum | View Image |
| 062-03000-0 | 5037106013 | Strap, Al, Solid, Long, Modified | |
| 062-03000-0 | 6042100001 | Strap, Heater, CBL, 9" | View Image |
| 141-00025-0 | 5037106004 | Mount, Sensor, Rotar, Shuttle | View Image |
| 141-00040-0 | 5037106003 | Shuttle, Flag, Rotate | View Image |
| 141-00064-0 | 5037106002 | Pins, Search, Pin | View Image |
| 152-00008-0 | 5099202230 | O-Ring, Flurosilicone | |
| 189-00001-0 | 5037106017 | Nest, Cassette, 8" | View Image |
| 199-01002-0 | 5037106009 | Window, Plexiglass, Robot | View Image |
| 262-00001-0 | 5037106018 | Collar, Ceramic, Spindle | |
| 262-00002-0 | 5037106021 | Arm, Spindle | |
| 262-00002-0 | 5037106029 | Refurbishment, Arm, Spindle, Mattson | |
| 262-00007-0 | 5037106035 | Flange | |
| 262-00009-0 | 5037106034 | Shaft, Spindle | |
| 303-08253-0 | 5037106016 | Strap, Heater, L-Shape | View Image |
| 303-08253-0 | 5037106015 | Strap, Heater, L-Shape | |
| 303-21220-0 | 5037106032 | Pin, Lift, Wafer | |
| 303-22987-0 | 5037106037 | Screw, Mounting, Block, Heater | |
| 456-00226-9 | 5099202231 | O-Ring, Viton | |
| 456-01027-0 | 5099202232 | O-RIng, Flurosilicone | |
| 456-01027-0 | 5099202233 | O-Ring, Viton | |
| 456-01027-0 | 5099202218 | O-Ring, Fluorosilicone | |
| 456-09062-0 | 5037102002 | Seal, Lip, Shaft | View Image |
| 533-04082-0 | 5099106216 | Element, Heater, 110V, 750W | View Image |
| 544-00014-0 | 5037106000 | Grid, Lower | View Image |
| 544-00015-0 | 5037106050 | Ring, Focus, Guide | |
| 544-00016-0 | 5037106010 | Grid, Upper | View Image |
| 913-10053-0 | 5099202219 | O-Ring,Silicon | |
| 913-10054-0 | 5099202236 | O-Ring, Viton | |
| 913-10066-0 | 5099202237 | O-Ring, Kalrez | |
| 913-11003-0 | 5037102001 | Seal, Lip | View Image |
| 913-12003-0 | 5037102003 | T-Seal | View Image |
| 916-11002-0 | 5037106006 | Sheath, TC | View Image |
| 6042100003 | Plate, Support, Cassette | View Image | |
| 71001-2300 | Cassette, Anodized, 6" | View Image | |
| 71001-2301 | Cassette, Coated, Tufram, 6" | View Image | |
| 71001-2302 | Cassette w/Handle Plates, Coated, Tufram, 6" | View Image | |
| 123456789 | Test | ||
| 71001-2400 | Cassette, Coated, Tufram, 8" | ||
| 71001-2401 | Cassette, Solid Top w/Handle Coated, Tufram, 8" | ||
| 5037106024 | Plate, Transformer, RF, Mattson | ||
| 5099106209 | Shaft, Puller | ||
| 6002200088 | Brace, AL |
