| 022-101324-1 | 5003101003 | Bearing | |
| 022-101377-1 | 5003101000 | Bearing | |
| 022-101387-1 | 5003101004 | Bearing | |
| 024-000016-1 | 5003102016 | Valve, Vacuum (Mark 2) | |
| 024-001529-1 | 5003102002 | Assembly, Valve, Coater | |
| 024-001617-1 | 5003102012 | Regulator (D.I.W., I.W.) | |
| 024-001926-1 | 5003102011 | Gauge, Pressure | |
| 024-003220-1 | 5003102008 | Actuator, Rotary | |
| 024-004186-1 | 5003102014 | Valve, 2 Way | |
| 024-004437-1 | 5003102000 | Dispense, Rotary, 90 Deg, Actuator | |
| 024-005520-1 | 5003102015 | Valve, Check | |
| 024-0303502-1 | 5003102013 | Valve, Relief | |
| 027-100288-1 | 5003102001 | O-Ring, 2.167 Size .103 Thk (Coater) | |
| 032-000005-1 | 5003001020 | Washer, M3, SUS304 | |
| 032-000251-1 | 5003001019 | Washer, M3, SUS304 | |
| 080-101490-1 | 5003103001 | Arm, Load, Ceramic | |
| 1010-410350-11 | 5003006093 | Clip, Cover, Gap, B T (PE) Etcher | |
| 1110-422926-11 | 5010006015 | Fitting, Exchangeable, (DS) | |
| 1187-019931-12 | 5003006092 | Tube, Assembly, G4-250, Etcher | |
| 1331810-429138-11 | 5003006091 | (I.P.B.), (UP), Tube , Connection, He | |
| 1810-430850-11 | 5003006097 | (HE), Pipe, Support | View Image |
| 1810-431200-11 | 5003006095 | Pipeholder, Support, Chiller, Etcher | |
| 1910-430175-12 | 5003006041 | Block, Wafer, Teflon, 8" | View Image |
| 1D10-410350-11 | 5003006093 | (PE), T, B, Gap, Cover, Lip | View Image |
| 2910-290041-12 | 5003006061 | Tweezers, 8" | View Image |
| 2985-419058-12 | 6008000021 | Assembly, Tweezers | View Image |
| 310-211696-2 | 5003106000 | Chuck, Teflon w/Shaft Adapter | |
| 310-290647-7 | 5003006062 | Pincette | View Image |
| 3M10-40553-11 | 5003001016 | Screw, MSx30-SH,H4, Etcher | |
| BB10-100332-12 | 5003006098 | Holder, Suseptor, Quartz, MB2-730 | |
| BB10-400322-12 | 5003006104 | Pin, Lifter | |
| CT-1310-290833-13 | 5003006068 | Indexer Ceramic Arm | View Image |
| CT-2910-303022-12 | 5003006121 | (Tweezers), Pincette, Inch, 8 | View Image |
| CT-310-290498-2 | 6008100005 | Chuck, Spin, 6", Modified | View Image |
| CT020-001727-1 | 5003001022 | Screw, Flathead, Phillips, M2x3, SS | |
| CT1310-498062-11 | 5003006031 | Spacer, Sopper | View Image |
| ID05-400022-14 | 5003006067 | Window | View Image |
| MBBB10-201849-11 | 5003006106 | Holder, TC | View Image |
| MBBB10-306339-11 | 5003006103 | Window, Quartz, Plate, Shield | |
| MBBB10-400627-11 | 5003006107 | Pin, Metal, Ring, Shield | View Image |
| 5003006006 | Clamp, Anodized, Hard, Small | View Image |
| 5003006009 | Ring, Teflon, Solid | View Image |
| 5003006010 | Arm, Pincette, 6" | View Image |
| 5003006012 | Cap, Teflon, 580 | View Image |
| 5003006013 | Cap, Teflon, 580 | View Image |
| 5003006015 | Ring, Focus, Quartz, GE 124 | View Image |
| 5003006017 | Ring, Shield, Quartz, GE 124 | View Image |
| 5003006018 | Screw , Housing | View Image |
| 5003006024 | Pin, Proximity, M3000, 0.1 mm | View Image |
| 5003006027 | Wafer, Spacer, Ceramic | View Image |
| 5003006028 | Pin, Proximity, Mark V & VII | View Image |
| 5003006030 | Pin, Guide | View Image |
| 5003006040 | Block, Wafer, Teflon, 6" | View Image |
| 5003106008 | Screw, Vespel | View Image |
| 6008100001 | Assy, Ring, Vespel Inserts | View Image |
| 6008100005 | Chuck, Spin, Modified | View Image |
| 5003006016 | Ring, Shield, Quartz, GE 144 | |
| 5003006020 | Bracket, Gauge | |
| 5003006025 | Pin, Proximity, M3000, 0.2 mm | |
| 5003006029 | Ring, Pin, Proximity | |
| 5003006032 | Cover, Plexiglass | |
| 5003006033 | Door, Panel, Plexiglass, Mark Vll, Left | |
| 5003006034 | Door, Panel, Plexiglass, Mark Vll, Right | |
| 5003006035 | Cover, Plexiglass, Mark V, Long | |
| 5003006036 | Cover, Plexiglass, Mark V, Short | |
| 5003101001 | Bearing | |
| 5003101002 | Bearing | |
| 5003101005 | Bearing | |
| 5003101007 | Bearing, Non-Shielded | |
| 5003102003 | Manifold, Air | |
| 5003102004 | Valve, Air | |
| 5003102005 | Valve, Air, Track | |
| 5003103000 | Motor (Copal) | |
| 5003103003 | Block, Wafer, Teflon | |
| 5003106004 | Ring, Baffle, Slotted | |
| 5003106005 | Platform, Baffle, Teflon | |
| 5003106007 | Screw, Ring, Baffle, Teflon | |
| 6008000000 | Bushing, Snap, 2 Pc., Vespel | |
| 6008000002 | Kit, PM, 5000, Tel | |
| 6008000005 | Cover, Plexiglass, Mark V, Long, Modified | |
| 6008000016 | Kit, PM, O-Ring, Semi-Annual, M3000 | |
| 6008000017 | Kit, PM, O-Ring, Semi-Annual, Developer, M3000 | |
| 6008000018 | Kit, PM, O-Ring, Semi-Annual, Coater, M3000 | |
| 6008000019 | Kit, PM, O-Ring, Semi-Annual, Developer, M3000 | |
| 6008100000 | Assy., Ring, Baffle | |
