| 01-0585-1 | 5030000003 | Pin, Locator, Al | |
| 01-0585-1 | 5030000004 | Pin, Locator, SS | |
| 01-0585-1 | 5030000005 | Pin, Locator, Vespel | |
| 01-2839 Rev. A | 5030000007 | Pin, Door | |
| 06-0142 | 5030000016 | Showerhead, Bottom | View Image |
| 10488-000 | 5030000013 | Tube, Plasma, Panjit | |
| 15-161439 | 5030000011 | Plate, Isolator, Modified, Quartz | |
| 16783-01 | 5030009001 | Chamber, Quartz, Plasma | |
| 17304-01 | 5030000020 | Showerhead, Middle | View Image |
| 17621-01 | 5030009002 | Plate, Gas, Distribution, 6" | |
| 307868-001 | 5039106108 | Screw, Delrin, Head, Pan, 4-40x1/2 | |
| 307868-002 | 5039106107 | Screw, Delrin, Head, Pan, 4-40x1 | |
| 308164-001 | 5039102003 | Conn, Male, Q-Disc, 10-32 VNFx1/8T | |
| 308334-001 | 5039106019 | Spinner, Enhanced | |
| 316652-212 | 5039106154 | Washer, Flat, Peek | |
| 408310-001 | 5039106073 | Cup, Drain, Motor, Spin | |
| 410831-001 | 5039106125 | Paddle, Wafer | |
| 410892-001 | 5039106104 | Bracket, AI, H, Sensor Mount, Clear Anodization | View Image |
| 410910-001 | 5039106114 | Tube, Exhaust | View Image |
| 411032-001 | 5039106197 | Flag, Coat ARD Dispense | |
| 411039-001 | 5039106138 | Shield, SP, Back, Half | |
| 411460-001 | 5039106038 | Shield, SP, Half, Front, Hexr | |
| 411471-002 | 5039105041 | Supply, Power, RX90 | |
| 411984-001 | 5039106084 | End Effector, Locator, 560C, Finger Tip | View Image |
| 412148-001 | 6045000018 | Plate, Bake, P21/2200 | |
| 412711-001 | 5039106030 | Tip, Vespel | View Image |
| 414997-001 | 5039106013 | Pin, Proximity | |
| 414998-001 | 5039101011 | Spring, Pin, Lift | |
| 415581-001 | 5039106102 | Tray, Drain, SP | View Image |
| 416230-001 | 5039106103 | Tube, Drain, SP | View Image |
| 416770-001 | 5039106101 | Mount, Nozzle, Head, Motor | View Image |
| 417078-002 | 5039106180 | HOUSING, HEXR, 4-TUBE | |
| 417078-005 | 5039106169 | Cap, HEXR, 4-Tube | |
| 417079-002 | 5039106181 | PLATE, HEXR, O-RING, 4-TUBE | |
| 417079-005 | 5039106166 | Plate, Exchanger, Heat, O-ring, 4-Tube | |
| 417080-001 | 5039106168 | Housing, HEXR, 4-Tube | |
| 417098-047 | 5039106099 | Nozzle, BSR/EBR, Chuck, LCM, 2.50 | |
| 417106-005 | 5039106167 | Spacer,Exchanger, Heat, 4-Tube | |
| 417174-001 | 5039106130 | Nozzle, DSP, PFA, Heat Exchanger | |
| 417174-001 Mod | 5039106075 | Nozzle, DSP, Pyrex, Heat Exchanger | |
| 417174-002 | 5039106131 | Nozzle, DSP, PFA, Stream | |
| 417174-003 | 5039106132 | Nozzle, DSP, PFA, Low Viscosity Chemical | |
| 417174-003 Mod | 5039106092 | Nozzle, DSP, Pyrex, Low Viscosity Chemical | |
| 417174-004 | 5039106133 | Nozzle, DSP, PFA, Anti Relfective Coating | |
| 417174-005 | 5039106134 | Nozzle, DSP, PFA, Develop | |
| 418081-002 | 5039106183 | Housing, HEXR, Lower, 4-Tube | |
| 418081-005 | 5039106171 | Housing, HEXR, Lower, 4-Tube | |
| 418082-002 | 5039106184 | Cap, Heat Exchanger, 4-Tube | |
| 418082-005 | 5039106173 | Cap, Exchanger, Heat, 4-Tube | |
| 418083-002 | 5039106182 | Plate, HE, O-Ring, 4-Tube | |
| 418083-005 | 5039106172 | Plate, HE, O-Ring, 4-Tube | |
| 418531-001 | 5039106176 | Cap, Heat Exchanger, 2.00 Tube | |
| 418532-001 | 5039106175 | Cap, Tube, 2.000 Inch Diameter | |
| 418838-001 | 5039106094 | Pin, Shear, Effector, End, RX-90 | |
| 419155-001 | 5039106117 | Weld, Filler, Rinse | |
| 420142-001 | 5039106061 | SP, Washer, POU, Mixing ID | View Image |
| 420143-001 | 5039106062 | SP, Washer, POU, Mixing OD | View Image |
| 420144-001 | 5039106063 | SP, Spacer, POU, Mixing Center | View Image |
| 420145-001 | 5039106064 | SP, Spacer, POU, Mixing Inlet | View Image |
| 420146-001 | 5039106065 | SP, Spacer, POU, Mixing Outlet | View Image |
| 420534-001 | 5039106072 | Adapter, SP, Spin, Motor | View Image |
| 420535-001 | 5039106071 | Holder, Seal, Motor | |
| 421739-001 | 5039106012 | Cup, Vacuum, Arm, Load | View Image |
| 422425-001 | 5039106177 | Plate, Nut | |
| 422430-001 | 5039106070 | Cover, Controller, Interlock | |
| 422501-001 | 5039106174 | Elbow, HEXR | |
| 422547-001 | 5039106160 | Outrigger, Resist, Fourth | |
| 422578-001 | 5039106178 | Retainer, EBR Tube, HEXR | |
| 423809-001 | 5039106026 | Bracket, Pressure Sensor | |
| 423810-001 | 5039106027 | Mount, Pressure Sensor | |
| 424231-001 | 5039106059 | LH Vertical Adjustment SP Bracket | View Image |
| 424232-001 | 5039106058 | Bracket, SP, Adjustment, Vertical, RH | View Image |
| 425172-001 | 5039106057 | Bracket, SP, Adjustment, Vertical, #4, Bottom | View Image |
| 425230-001 | 5039106056 | Mount, SP, Dispense, 4-Tube | View Image |
| 427631-001 | 5039106096 | Tip, Rinse, Exhaust, SS | |
| 427810-001 | 5039106052 | Adjustment, Sensor, Bracket | |
| 427811-001 | 5039106051 | Adjustment. Sensor, Screw | |
| 428497-001 | 5039102002 | Reducer, Bored 1/8T x1/4MT (SW) | |
| 428641-001 | 5039106028 | Tube, SP Drain Acetal | |
| 429076-001 | 5039106053 | Adjustment, Sensor, Mount | |
| 436737-001 | 5039106024 | Nozzle, UHP, SSM, CT, 3/16x0.130ID | View Image |
| 436737-006 | 5039106034 | Nozzle, UHP, SSM, CT, 3/16x0.100ID | View Image |
| 436737-011 | 5039106035 | Nozzle, UHP, SSM, CT, 3/16x0.063ID | View Image |
| 441832-001 | 5039106152 | Bracket, Meter, Flow | |
| 441833-001 | 5039106151 | Guard, Pinch, Altered | |
| 441836-001 | 5039106153 | Support, Top, Exhaust, Chamber | |
| 447333-001 | 5039106156 | Button, Small, Style, New | |
| 447333-002 | 5039106157 | Button, Large, Style, New | |
| 71002-12 | 5030002003 | O-Ring, Viton | |
| 71002-12 | 5030002010 | O-Ring, ParoFluor | |
| 71002-12 | 5030002019 | O-Ring, Viton | |
| 71003-13 | 5030002024 | O-Ring, Viton | |
| 71003-15 | 5030002001 | O-Ring, Viton | |
| 71003-15 | 5030002008 | O-Ring, ParoFluor | |
| 71003-15 | 5030002018 | O-Ring, Viton | |
| 71003-19 | 5030002000 | O-Ring, Viton | |
| 71003-19 | 5030002007 | O-Ring, ParoFluor | |
| 71003-19 | 5030002017 | O-Ring, Viton | |
| 71003-20 | 5030002025 | O-Ring, Viton | |
| 71004-17 | 5030002006 | O-Ring, Dur, Viton | |
| 71004-17 | 5030002013 | O-Ring, ParoFluor | |
| 71004-17 | 5030002022 | O-Ring, Viton | |
| 71004-19 | 5030002005 | O-Ring, Viton | |
| 71004-19 | 5030002012 | O-Ring, ParoFluor | |
| 71004-19 | 5030002021 | O-Ring, Viton | |
| 71004-60 | 5030002004 | O-Ring, Viton | |
| 71004-60 | 5030002011 | O-Ring, ParoFluor | |
| 71004-60 | 5030002020 | O-Ring, Viton | |
| 71004-76 | 5030002016 | O-Ring, Viton | |
| 71005-68 | 5030002023 | O-Ring, Viton | |
| 71005-68 | 5030002049 | O-Ring, Plate, Quartz, Viton, | |
| 73126-07 | 6030000000 | Assy, Motor, Arm, Load (SS Gear) | |
| 73126-07 | 6030000001 | Assy, Motor, Arm, Load (Al Gear) | |
| 73230-02 | 5030002002 | O-Ring, Kalrez | |
| 73313-03 | 5030009000 | Filter, Gas, 1/4" MVCR | |
| 7337-01 | 5030002050 | Seal, Quad, Viton | |
| 905834-002 | 5039106005 | Chuck, LCM, 200mm | View Image |
| 905834-003 | 5039106003 | Chuck, LCM, 150mm | View Image |
| 906253-001 | 5039105038 | Assembly, Cable, SP, Heater, Exchanger, RTD | View Image |
| 907205-005 | 5039106141 | Chuck, Workcell, Polaris, 4" | |
| 907624-047 | 6045000022 | Assy, Nozzle, Menisc, BSR/EBR, Chuck, 2.50 | |
| 907937-001 | 5039106082 | Nozzle, EBR, Top | View Image |
| 908579-003 | 5039106067 | Assy, Joint, Rotary, RX90A and RX90B | |
| 909508-001 | 5039106135 | Assy, Filter, Flange, Exhaust | |
| 909660-001 | 5039106137 | Assy, Manifold, Exhaust Rinse | |
| 912457-001 | 5039105008 | Board, PC, Effector, End | |
| 912467-001 | 5039105008 | Board, PC, Effector, End | |
| 912593-002 | 6045000041 | Head, Dispense, Coater, P2000 | |
| 914395-001 | 6045000009 | Kit, Standard. Rdl, Dispense, Manip, #4 | |
| 916861-001 | 5039105059 | Assy, Cable, RTD, 250C, 12" | |
| 916861-002 | 5039105061 | Assy, Cable, RTD, 250C, 5" | |
| 916861-003 | 5039106053 | Assy, Cable, T/C, Bake/Chill, Precision | |
| 916861-004 | 5039105060 | Assy, Cable, RTD, 250C, 16" | |
| 917508-001 | 5039105012 | Assy, Cable, SSR, I/OJ8, STA, 300mm | View Image |
| 917515-001 | 5039105009 | Assy, Cable, Motor, Step, 300mm | View Image |
| 917865-001 | 5039106025 | Assy, Bowl Pressure Sense, SP | |
| 918339-001 | 5039106029 | Chuck, LCM, 300mm | View Image |
| 9191 86-150 | 6045000001 | Support, Wafer, 150mm (PEEK) | View Image |
| 9191 86-150 | 6045000003 | Assy, Support, Wafer, 150mm (PAI) | |
| 919186-200 | 6045000000 | Support, Wafer, 200mm | View Image |
| 919956-001 | 5039105010 | Assy, Cable, Harn, Throt, EXH, Upper | View Image |
| 919962-001 | 5039105011 | Assy, Cable, Harn, Throt, EXH, Lower | |
| 920654-150 | 5039105039 | Assy, Cap, Sensor, 150mm | |
| 920654-200 | 5039105055 | Cap Sensor Assembly, End Effector, 200/300mm | View Image |
| 921442-001 | 5039105013 | Assy, Cable, I/O, Sta, Bake, UHP, 300mm | View Image |
| 924078-001 | 5039105015 | Assy, Cable, Axis, Theta, SSM | View Image |
| 924080-001 | 5039105014 | Assy, Cable, Axis, Theta, Actr, Dsp, SSM | View Image |
| 925941-150 | 6045000003 | Assy, Support, Wafer, 150mm | |
| 925941-300 | 6045000002 | Support, Wafer, 300mm | View Image |
| A06-010-01 | 5030000006 | Tube, Plasma, Quartz | |
| 5039105025 | Spinner, Orginal | View Image |
| 5039106083 | Horseshoe, Arm, Radial, P1000 | View Image |
| 5039106015 | Pin, Proximity, Plate, Heater (-6MM) | View Image |
| 5039106023 | Cup, Vacuum, Arm, Load, Large | View Image |
| 6045000008 | Assembly, Adjustment, Sensor | View Image |
| 5030000000 | Cassette, Turfram, Aluminum | |
| 6030000003 | Kit, PM, Center, Reactor, Day, 90 | |
| 5039102009 | O-Ring, Kalrez | |
| 5039105026 | Repair, Power Supply, Switching | |
| 5039105029 | Repair, Supply, Power | |
| 5039106004 | Tube, Standoff, Heater, Ceramic | |
| 5039106007 | Loop, Exhaust | |
| 5039106009 | Assy, Pin, Proximity | |
| 5039106012 | Cup, Vacuum, Arm, Load | |
| 5039106013 | Pin, Proximity, Plate, Heater | |
| 5039106014 | Pin, Proximity, Plate, Heater (-3MM) | |
| 5039106022 | Cup, Vacuum, Arm, Load, PAI, Small | |
| 5039105025 | Spinner, Orginal | |
| 5039105026 | Repair, Power Supply, Switching | |
| 5039105029 | Repair, Supply, Power | |
| 5039106049 | Refurbishment, Wrist, Robot, RX-90 | |
| 5039106075 | Tip, Dispense, Qtz, P2000 | |
| 5039106076 | Tip, Dispense, Qtz, P1000 | |
| 5039106085 | Gasket, Kapton | |
| 5039106086 | Gasket, Kapton, Modified | |
| 5039106087 | Gasket, Kapton, Modified, Solid | |
| 5039106091 | Nozzle, Resist, 200mm, P2000 | |
| 5039106092 | Tip, Dispense, Quartz, Nozzle, P2000 | |
| 5039106093 | Stop, Locator, 560C | |
| 5039106100 | Shield, SP, Front, Half, P2000 | |
| 5039106112 | Box, Drain, Multi-Port | |
| 5039106113 | Wash, Bowl, 200mm, Special | |
| 6045000004 | Kit, Bowl Pressure Sense, SP | |
| 6045000006 | Motor, Spin, Reliance, Rebuild | |
| 6045000013 | Assy, Cup, Solvent, P2000 | |
| 6045000020 | Assy, Cable, Ribbon, POS, 24, Robot | |
| 6045000021 | Assy, Cable, Ribbon, POS, 16, Robot | |
| 6045000022 | Nozzle, Rinse, Side, Back | |
| 6045000023 | Kit, SP, Upgrade, Drain, Wafer | |
| 6045000027 | Assy, Bowl, 200mm, Modified | |
| 6045000028 | Kit, Rebuild, Arm, Radial | |
| 6045000042 | Module, Lower, Coater | |
| 6047000001 | Arm, Load, SS, UV, Tencor | |
| 6048500000 | Assy, Cup, Solvent, Nozzle, DNS | |
