| 471550 | 5045006012 | M4x10mm Caphead Screw | View Image |
| 712514 | 5045006053 | Shield, Chamber, Lower, FXP ICP | |
| 720394 | 6044000004 | Assy, Shield, Collar, ICP, 150-200 Pin | |
| 2027473 | 6044000004 | Assy, Lid, Cooled, Interferom ICP CGI | |
| 2027573 | 5045006045 | Shield, Viewport, 48mm Long | |
| 2027574 | 5045006048 | Assy, Shield, Viewport, 82 Lg | |
| 2027575 | 5045006046 | VAT, Slot, Shield, Lower | |
| 2027576 | 5045006047 | VAT, Slot, Shield, Upper | |
| 2028681 | 5045006052 | Assy, Shield, Collar, FXP ICP, 76-125 Pin | |
| 2029442 | 5045006044 | Shield, Viewport, 82mm Long | |
| 2031114 | 5045006049 | Segment, Shield, Upper | |
| 2031115 | 5045006050 | Segment, Shield, Lower Right | |
| 2031116 | 5045006051 | Segment, Shield, Lower Left | |
| 2041541 | 5045006041 | Plenum, Inner | |
| 111967 E01 | 5045006030 | Generic Electrode Shield Ring | |
| 112160 E02 | 5045006027 | Pin Assembly Plate | View Image |
| 112368 E01 | 5045006004 | Ceramic Quad Clamp Support Ring | View Image |
| 112537 E03 | 5045006011 | Hanger Rod | View Image |
| 11291 E02 | 5045006002 | M4 Screw Shield Cap | View Image |
| 1C7133 | 5045006013 | PTFE Foot | View Image |
| 4P1500 | 5045006015 | M4 Nut | View Image |
| A11292 D01 | 5045006003 | 100mm Ceramic Finger Quadrant Clamp | View Image |
| A11292 D01 | 6044000001 | 100mm Quadrant Clamp Assembly | View Image |
| AS301177-02 | 6044000003 | Platen Spring Pin Assembly | |
| DT301137-02 | 5045006028 | Platen Inner Screw | View Image |
| DT301176-02 | 5045006023 | 100mm Flat Platen (RE) | View Image |
| DT301176-02 | 5045006026 | Pin Assembly Pin | View Image |
| DT303545 | 5045006060 | Platen, Flat, ICP, 100mm Special | |
| DT303547-02 | 5045006031 | Generic 100mm Electrode Shield | |
| DT307154-01 | 5045006009 | Anodized Finger Clamp | View Image |
| DT307162 | 5045006033 | Source Shield | |
| DT307391-01 | 5045006025 | Electrode Shield (Quartz) | View Image |
| DT307392-01 | 5045006022 | 100mm Platen Shield | View Image |
| DT319470 | 5045006042 | Ring, Plenum, Outer, AOE | |
| DT319893 | 5045006043 | 100mm, Guard, Ring | |
| DT319893 | 5045006043 | Ring, Guard, 100mm | |
| FB301117 | 5045006019 | Slice Lift Tripod Assy | |
| 5045006000 | Chuck Top Shield | View Image |
| 5045006001 | Chuck Lower Shield | View Image |
| 5045006005 | 100mm Quad Clamp Ring | View Image |
| 5045006006 | Ceramic Wafer Holder | View Image |
| 5045006007 | Hanger Rod Screw | View Image |
| 5045006008 | Ceramic Liner | View Image |
| 5045006010 | 100mm Weight Quadrant | View Image |
| 5045006018 | Modified Ceramic Wafer Holder | View Image |
| 5045006020 | 102mm Ceramic Wafer Holder | View Image |
| 5045006021 | Etcher 24 Chuck Platen | View Image |
| 5045006024 | Etcher 24 Gas Feed | View Image |
| 5045006029 | 102mm Aluminum Wafer Holder | View Image |
| 5045006032 | Ceramic Inner Electrode Ring | View Image |
| 5045006034 | STS Showerhead | View Image |
| 6044000002 | ICP Quick Clean Kit | View Image |
| 6112000000 | ICP Chamber Weighted Clamp | View Image |
| 5045006014 | M4 X 55mm Slotted Panhead Screw | |
| 5045006016 | M4x16mm Vented Set Screw | |
| 5045006017 | M4x12mm Caphead Screw | |
