| VTI PN | DESCRIPTION | IMAGE |
|---|---|---|
| WAFER ESCALATORS | ||
| 70001-1001 | Escalator, Wafer, 5", Antistatic | |
| 70001-1002 | Escalator, Wafer, 6", Antistatic | |
| 70001-1003 | Escalator, Wafer, Antistatic, 6", Modified | |
| 70001-1004 | Escalator, Magnifying, 4/5/6" Combo | |
| 70001-1005 | Escalator, Wafer, 6" | |
| 70001-1006 | Escalator, Wafer, Antistatic, 6", Modified | |
| 70001-1007 | Escalator, Wafer, 200mm, Modified | |
| 70001-2000 | Escalator, Wafer, 8", Antistatic | |
| FLAT ALIGNERS | ||
| 70002-1000 | Flat Aligner, Antistatic, 6" | |
| 70002-1001 | Flat Aligner, Auto, Antistatic, 6" | |
| 70002-1002 | Flat Aligner, Square Base, Antistatic, 6" | |
| 70002-1003 | Flat Aligner, Antistatic, 4" | |
| 70002-1004 | Flat Aligner, Antistatic, Combo (4," 5," 6") | |
| 70002-1007 | Finder, Notch, Antistatic, 6" | |
| 70002-2000 | Notch Aligner, Antistatic, 8" | |
| WAFER PRESENTERS | ||
| 70003-1000 | Presenter, Wafer, Antistatic, 6" | |
| 70003-1001 | Presenter, Wafer, Antistatic, 5" | |
| 70003-1002 | Presenter, Wafer, Antistatic, 4" | |
| 70003-1003 | Presenter, Wafer, Antistatic, 6", Modified | |
| 70003-1004 | Presenter, Angled, Antistatic, 4" | |
| 70003-1005 | Presenter, Wafer, Single, 6" | |
| 70003-1006 | Presenter, Wafer, Arm, Finger, Single | |
| 70003-1007 | Presenter, Single Wafer, 6," UHMW | |
| 70003-1008 | Pre-Aligner, Wafer-Presenter, 200mm, Modified | |
| 70003-1010 | Tool, Inspection, Wafer, Backside, 6" | |
| 70003-2000 | Presenter, Wafer, Antistatic, 8" | |
| 70003-2002 | Tool, Inspection, Wafer, Backside, 8" | |
| WAFER TRANSFER SLIDE | ||
| 70004-1000 | WTS, Antistatic, 4/5/6" Combo | |
| 70004-1001 | WTS, Wafer, Flip | |
| 70004-1002 | WTS, Antistatic, 4/5/6" Combo, Extended | |
| 70004-1003 | WTS, Container, Transport, 3" | |
| 70004-1004 | WTS, Container, Transport, 4" | |
| 70004-1005 | WTS/Flat Aligner Combo, 4/6" | |
| 70004-1006 | WTS, w/o Turntable, Ergonomic, 6" | |
| 70004-1007 | WTS, Lock, Combo | |
| 70004-1008 | WTS, Contact, Direct | |
| 70004-1009 | WTS/Flat Aligner/Escalator, 4/6" Three Way Combo | |
| 70004-1012 | WTS, Odd/Even, Antistatic, 6" | |
| 70004-1013 | WTS/Flat Aligner/Presenter, ESD 4/6" | |
| 70004-1014 | WTS/Flat Aligner/Escalator, ESD, 4/6" | |
| 70004-1015 | WTS, Modified | |
| 70004-1016 | WTS, Modified | |
| 70004-1017 | WTS, Modification | |
| 70004-1018 | WTS, Hi-Temp, Modification | |
| 70004-1019 | WTS, Arsenide/Gallium Combo | |
| 70004-1020 | WTS, Horizontal, Odd/Even | |
| 70004-1021 | WTS, Fluoroware, Varian, 5" | |
| 70004-1022 | WTS, Enclosed Base | |
| 70004-1023 | WTS, Fluoroware, ASM | |
| 70004-1024 | WTS/Flat Aligner/Presenter, Combo (4," 6") | |
| 70004-1025 | WTS/Flat Aligner/Presenter (Single), Combo (4,"6") | |
| 70004-1026 | WTS, Odd/Even, Antistatic, 4" & 6" | |
| 70004-1027 | WTS, 8" | |
| 70004-1028 | WTS, Stationary, 6" | |
| 70004-1029 | WTS, Stationary, 200mm | |
| 70004-1030 | WTS, Antistatic, Combo (4," 5," 6"), Poly-Urethane Face | |
| 70004-1031 | WTS, Split, 4-way, 150mm | |
| 70004-1032 | WTS, Split, 4-way, 200mm | |
| 70004-1033 | WTS, Half-lot, 150mm | |
| 70004-1034 | WTS, Half-lot, 200mm | |
| 70004-1035 | System, Locking, Cassette, WTS, 200mm | |
| 70004-1039 | WTS, High/Low, Anti-Static | |
| 70004-2000 | WTS, 6/8" Combo | |
| 70004-2001 | WTS, Antistatic, 8" | |
| WAFER HANDLERS | ||
| 70005-1100 | Handle, Wafer, Wafirm, 3" | |
| 70005-1200 | Handle, Wafer, Wafirm, 4" | |
| 70005-1201 | Handle, Wafer, Wafirm, 4", Modified | |
| 70005-1300 | Handle, Wafer, Wafirm, 5" | View Image |
| 70005-1400 | Handle, Wafer, Wafirm, 6" | |
| 70005-1500 | Handle, Wafer, Wafirm, 8" | |
| 70005-2000 | Handle, Reticle, 6x6 | |
| 70005-2001 | Handle, Reticle | |
| 70005-2002 | Handle, Reticle, Modified | |
| 70005-2003 | Pick, RSG | |
| 70005-2004 | Pick, Photo, 35-Degree Angle | |
| 70005-2005 | Reticle Handle, Right Handed | View Image |
| 70005-2400 | Handle, Reticle, 6x6 | |
| 70005-3100 | Tweezer, 3" | |
| 70005-3101 | Tweezer, Lip, Flat | |
| 70005-3102 | Tweezer, Wafer, 1" | |
| 70005-3103 | Tweezer, w/ Teflon Coated Finger, 1" | |
| 70005-3200 | Tweezer, handling, Wafer, 4" | |
| 70005-3201 | Tweezer, 4mm, Type L | |
| 70005-3202 | Tweezer, w/ Teflon Coated Fingers, 4mm | |
| 70005-3400 | Tweezer, Handling, Wafer, 6" | |
| 70005-3401 | Tweezer, Safe-Lock | |
| 70005-3500 | Tweezer, handling, Wafer, 8" | |
| 70005-4200 | Handle, Cassette, 3/4" | |
| 70005-4201 | Handle, Boat, Quartz | |
| 70005-4400 | Handle, Boat, 6" | |
| 70005-4401 | Handle, Boat, Quartz, 6" | |
| 70005-4402 | Handle, Cassette, Novellus, 6" | |
| 70005-4403 | Handle, Cassette, 6" | |
| 70005-4404 | Handle, Cassette, Teflon | |
| 70005-4500 | Handle, Cassette, Mattson, 8" | |
| 70005-5000 | Tool, Removal, Pellicle, Non-Contact | |
| 70005-5001 | Tool, Removal, Pellicle, Dual | |
| 70005-5002 | Tool, Removal, Pellicle, Dual, Modified | |
| 70005-5003 | Tool, Removal, Pellicle | |
| CASSETTES | ||
| 71001-1100 | Cassette, Aluminum, 4" | View Image |
| 71001-1101 | Cassette, Aluminum, 3" | View Image |
| 71001-1102 | Cassette, Tester, Jig, Q.C., 4" | |
| 71001-1200 | Cassette, Aluminum, 5" | |
| 71001-1201 | Cassette, w/ Solid Top/Bottom, Aluminum, 5" | |
| 71001-1202 | Cassette, Aluminum, 5", Modified | |
| 71001-1203 | Cassette, Tester, Jig, 5" | |
| 71001-1204 | Cassette, Tool, Alignment | |
| 71001-1205 | Cassette, Tool, Alignment, 5" | |
| 71001-1300 | Cassette, Metal, 6" | |
| 71001-1301 | Cassette, w/ Handle, Aluminum, 6" | |
| 71001-1302 | Cassette, Aluminum, 6", Modified | |
| 71001-1303 | Cassette, Tester, Jig, Q.C., 6" | |
| 71001-1304 | Cassette, Metal, Thru, Modified, 6" | |
| 71001-1400 | Cassette, Aluminum, 8" | View Image |
| 71001-1500 | Cassette, Holder, Plate, Reticle, KLA | |
| 71001-2300 | Cassette, Mattson, 6" | |
| 71001-2301 | Cassette, Coated, Teflon Impregnated, 6" | |
| 71001-2302 | Cassette, w/ Handle Plates, Coated, Teflon Impregnated, 6" | |
| 71001-2400 | Cassette, Anodized, Hard, 8" | |
| 71001-2401 | Cassette, Solid Top w/ Handle, Coated, Teflon Impregnated, 8" | |
| 71001-2402 | Cassette, Mattson, 8" (w/ Side Plates) | |
| 71001-3300 | Cassette, Aluminum, Novellus, 6" | |
| 71001-3400 | Cassette, Novellus, 8" | |
| 71001-4100 | Cassette, Aluminum, Varian, 4" | |
| 71001-4101 | Cassette, Aluminum, MD, 4" | |
| 71001-4102 | Cassette, Metal, 4", Rounded | |
| 71001-5500 | Cassette, Reticle, ASM | |
| 71002-1100 | Cassette, Teflon, 4" | |
| 71002-1200 | Cassette, Teflon, 5" | |
| 71002-1300 | Cassette, Teflon, 6" | |
| 71002-1400 | Cassette, Teflon, 8" | |
| 71003-5200 | Cassette, ASM, 125mm | |
| 71003-5300 | Cassette, ASM, 150mm | |
| 71004-1100 | Cassette, Stainless Steel, 4" | |
| MISCELLANEOUS PARTS | ||
| 5099006096 | Arm, Load, 300 mm, Ceramic | View Image |
| 73001-2000 | Cabinet, Purge, Nitrogen | |
| 73001-2001 | Cabinet, Storage, Purged, N2, 6 Compartment | |
| 73001-2002 | Box, Purge, Nitrogen, Large | |
| 73001-2003 | Box, Purge, Nitrogen, Small | |
| 73001-2004 | Pallot, Injector | |
| 73001-2005 | Station, Work, SEM, PP | |
| 73001-2006 | Cabinet, Purge, Nitrogen, SOG, 8" | |
| 73001-3000 | Cabinet, Purge, Nitrogen, Gate-Oxide | |
| 73001-3001 | Cabinet, Purge, Nitrogen, WJ | |
| 73001-3002 | Station, Inspect, Light, Particle, Wafer | |
| 73001-3003 | Box, N-Spec, Light, Bright, SS | |
| 73001-3004 | Station, Work, SEM, SS | |
| 73001-4000 | Cabinet, Purge, Nitrogen, Quartz | |
| 73002-2000 | Table, Injector | |
| 73002-3000 | Table, Cleaning, WJ 1500 | |
| 73002-3001 | Table, Injector, WJ, SS, 1000 | |
| 73002-3002 | Table, Cleaning, WJ 999 | |
| 74003-1210 | Chuck, DS-1 1C, ESC, Repair | |
| 75000-1000 | Tool, Cleaning, E-Chuck, Ceramic | View Image |
| 79001-1000 | Tool, Uniformity, EBR | |
| 79001-1001 | Tool, Uniformity, EBR, Modified | |
| 79001-1002 | Pod, Reticle, 1x, Aluminum | |
| 79001-1003 | Tool, Alignment, Showerhead 6" | |
| 79001-1004 | Tool, Alignment, Showerhead, 8" | |
| 79001-1005 | Tool, Alignment, Showerhead, 8", Maxus | |
| 79001-1006 | Tool, Alignment, Showerhead, 8", Modified | |
| 79001-1007 | Tool, Centering, Heater | |
| 79001-1008 | Tool, Alignment, Showerhead, 6", Modified | |
| 79001-1009 | Tool, Uniformity, EBR | View Image |
| 79002-1000 | Pourer, Bottle | |
| 79002-1001 | Funnel, Teflon (w/ chain) | |
| 79002-1002 | Holder, Dish, Petri, Teflon | |
| 79005-1000 | Rod, Fork, Boat, Vespel | |
| 79005-1001 | Carrier, Quartz, Chambered | |
| 79005-1002 | Rack, Quartz | |
| 79005-1003 | Carrier, Quartz | |
| 79005-1004 | Rod, Fork, Vespel, Handle, Lift, Boat, Quartz, Short | |
| 79005-1005 | Rod, Fork, Vespel, Handle, Lift, Boat, Quartz, Long | |
| 79005-1006 | Pod, Cleaning, Reticle | |
| 79005-1007 | Pod, Reticle, 1x | |
| 79005-1008 | Tank, PolyPro, 18 x 18 x 17 | |
| 79005-1009 | Tank, PolyPro, 18 x 18 x 18 | |
| 79005-1010 | Rack, Susceptor, APT | |
| 79005-1011 | Pen, Tip, Vespel, Dual | |
| 79006-1000 | Boat, Mask, 7" | |
| 79006-1001 | Boat, Mask, 8" | |
| 79007-1000 | Assembly, Chuck, Cover | |
| 79007-1001 | Holder, Plate, Reticle, KLA, Single | |
| 79007-1002 | Holder, Box, Reticle, 5x | |
| 79007-1003 | Holder, Box, Reticle, 1x |
